The Electro-Optical Characteristics of the AZO/Mo/AZO Transparent Conductive Film on PC Substrate

Tien-Chai Lin; Wen-Chang Huang; Fu-Chun Tsai

doi:doi:10.11648/j.ijmsa.20140305.21

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The Electro-Optical Characteristics of the AZO/Mo/AZO Transparent Conductive Film on PC Substrate

Tien-Chai Lin, Wen-Chang Huang, Fu-Chun Tsai

Published in International Journal of Materials Science and Applications (Volume 3, Issue 5)

Received: 29 August 2014 Accepted: 15 September 2014 Published: 30 September 2014

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Abstract

The triple-layered transparent conductive oxide thin films, AZO/Mo/AZO (OMO) structure, is present in the paper. The OMO film is deposited on polycarbonate (PC) substrates by a co-sputtering process at room temperature. Metal Mo is chosen because of its chemical stable and low resistivity. The OMO film shows a great reduction of resistivity through the addition of Mo layer. The dependence of the AZO thickness of the electro-optical characteristic to the OMO film is also discussed. A best figure of merit (FOM) of 1.56 × 10-5 -1 with a sheet resistance of 530 Ω/□ and average transmittance of 62% is found at the OMO film of 130 nm thickness. At this condition, the AZO film shows a low resistivity due to its excellent crystallinity.

Published in	International Journal of Materials Science and Applications (Volume 3, Issue 5)
DOI	10.11648/j.ijmsa.20140305.21
Page(s)	205-209
Creative Commons	This is an Open Access article, distributed under the terms of the Creative Commons Attribution 4.0 International License (http://creativecommons.org/licenses/by/4.0/), which permits unrestricted use, distribution and reproduction in any medium or format, provided the original work is properly cited.
Copyright	Copyright © The Author(s), 2014. Published by Science Publishing Group

Keywords

Transparent Conductive Oxide, ZnO, Mo, Sheet Resistance, Transmittance

References

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APA Style

Tien-Chai Lin, Wen-Chang Huang, Fu-Chun Tsai. (2014). The Electro-Optical Characteristics of the AZO/Mo/AZO Transparent Conductive Film on PC Substrate. International Journal of Materials Science and Applications, 3(5), 205-209. https://doi.org/10.11648/j.ijmsa.20140305.21

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ACS Style

Tien-Chai Lin; Wen-Chang Huang; Fu-Chun Tsai. The Electro-Optical Characteristics of the AZO/Mo/AZO Transparent Conductive Film on PC Substrate. Int. J. Mater. Sci. Appl. 2014, 3(5), 205-209. doi: 10.11648/j.ijmsa.20140305.21

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AMA Style

Tien-Chai Lin, Wen-Chang Huang, Fu-Chun Tsai. The Electro-Optical Characteristics of the AZO/Mo/AZO Transparent Conductive Film on PC Substrate. Int J Mater Sci Appl. 2014;3(5):205-209. doi: 10.11648/j.ijmsa.20140305.21

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@article{10.11648/j.ijmsa.20140305.21,
  author = {Tien-Chai Lin and Wen-Chang Huang and Fu-Chun Tsai},
  title = {The Electro-Optical Characteristics of the AZO/Mo/AZO Transparent Conductive Film on PC Substrate},
  journal = {International Journal of Materials Science and Applications},
  volume = {3},
  number = {5},
  pages = {205-209},
  doi = {10.11648/j.ijmsa.20140305.21},
  url = {https://doi.org/10.11648/j.ijmsa.20140305.21},
  eprint = {https://article.sciencepublishinggroup.com/pdf/10.11648.j.ijmsa.20140305.21},
  abstract = {The triple-layered transparent conductive oxide thin films, AZO/Mo/AZO (OMO) structure, is present in the paper. The OMO film is deposited on polycarbonate (PC) substrates by a co-sputtering process at room temperature. Metal Mo is chosen because of its chemical stable and low resistivity. The OMO film shows a great reduction of resistivity through the addition of Mo layer. The dependence of the AZO thickness of the electro-optical characteristic to the OMO film is also discussed. A best figure of merit (FOM) of 1.56 × 10-5 -1 with a sheet resistance of 530 Ω/□ and average transmittance of 62% is found at the OMO film of 130 nm thickness. At this condition, the AZO film shows a low resistivity due to its excellent crystallinity.},
 year = {2014}
}

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TY  - JOUR
T1  - The Electro-Optical Characteristics of the AZO/Mo/AZO Transparent Conductive Film on PC Substrate
AU  - Tien-Chai Lin
AU  - Wen-Chang Huang
AU  - Fu-Chun Tsai
Y1  - 2014/09/30
PY  - 2014
N1  - https://doi.org/10.11648/j.ijmsa.20140305.21
DO  - 10.11648/j.ijmsa.20140305.21
T2  - International Journal of Materials Science and Applications
JF  - International Journal of Materials Science and Applications
JO  - International Journal of Materials Science and Applications
SP  - 205
EP  - 209
PB  - Science Publishing Group
SN  - 2327-2643
UR  - https://doi.org/10.11648/j.ijmsa.20140305.21
AB  - The triple-layered transparent conductive oxide thin films, AZO/Mo/AZO (OMO) structure, is present in the paper. The OMO film is deposited on polycarbonate (PC) substrates by a co-sputtering process at room temperature. Metal Mo is chosen because of its chemical stable and low resistivity. The OMO film shows a great reduction of resistivity through the addition of Mo layer. The dependence of the AZO thickness of the electro-optical characteristic to the OMO film is also discussed. A best figure of merit (FOM) of 1.56 × 10-5 -1 with a sheet resistance of 530 Ω/□ and average transmittance of 62% is found at the OMO film of 130 nm thickness. At this condition, the AZO film shows a low resistivity due to its excellent crystallinity.
VL  - 3
IS  - 5
ER  -

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Author Information

Tien-Chai Lin

Department of Electrical Engineering, Kun Shan University, Tainan, Taiwan
Wen-Chang Huang

Department of Electro-Optical Engineering, Kun Shan University, Tainan, Taiwan
Fu-Chun Tsai

Department of Electro-Optical Engineering, Kun Shan University, Tainan, Taiwan

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APA Style

Tien-Chai Lin, Wen-Chang Huang, Fu-Chun Tsai. (2014). The Electro-Optical Characteristics of the AZO/Mo/AZO Transparent Conductive Film on PC Substrate. International Journal of Materials Science and Applications, 3(5), 205-209. https://doi.org/10.11648/j.ijmsa.20140305.21

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ACS Style

Tien-Chai Lin; Wen-Chang Huang; Fu-Chun Tsai. The Electro-Optical Characteristics of the AZO/Mo/AZO Transparent Conductive Film on PC Substrate. Int. J. Mater. Sci. Appl. 2014, 3(5), 205-209. doi: 10.11648/j.ijmsa.20140305.21

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AMA Style

Tien-Chai Lin, Wen-Chang Huang, Fu-Chun Tsai. The Electro-Optical Characteristics of the AZO/Mo/AZO Transparent Conductive Film on PC Substrate. Int J Mater Sci Appl. 2014;3(5):205-209. doi: 10.11648/j.ijmsa.20140305.21

Copy | Download

@article{10.11648/j.ijmsa.20140305.21,
  author = {Tien-Chai Lin and Wen-Chang Huang and Fu-Chun Tsai},
  title = {The Electro-Optical Characteristics of the AZO/Mo/AZO Transparent Conductive Film on PC Substrate},
  journal = {International Journal of Materials Science and Applications},
  volume = {3},
  number = {5},
  pages = {205-209},
  doi = {10.11648/j.ijmsa.20140305.21},
  url = {https://doi.org/10.11648/j.ijmsa.20140305.21},
  eprint = {https://article.sciencepublishinggroup.com/pdf/10.11648.j.ijmsa.20140305.21},
  abstract = {The triple-layered transparent conductive oxide thin films, AZO/Mo/AZO (OMO) structure, is present in the paper. The OMO film is deposited on polycarbonate (PC) substrates by a co-sputtering process at room temperature. Metal Mo is chosen because of its chemical stable and low resistivity. The OMO film shows a great reduction of resistivity through the addition of Mo layer. The dependence of the AZO thickness of the electro-optical characteristic to the OMO film is also discussed. A best figure of merit (FOM) of 1.56 × 10-5 -1 with a sheet resistance of 530 Ω/□ and average transmittance of 62% is found at the OMO film of 130 nm thickness. At this condition, the AZO film shows a low resistivity due to its excellent crystallinity.},
 year = {2014}
}

Copy | Download

TY  - JOUR
T1  - The Electro-Optical Characteristics of the AZO/Mo/AZO Transparent Conductive Film on PC Substrate
AU  - Tien-Chai Lin
AU  - Wen-Chang Huang
AU  - Fu-Chun Tsai
Y1  - 2014/09/30
PY  - 2014
N1  - https://doi.org/10.11648/j.ijmsa.20140305.21
DO  - 10.11648/j.ijmsa.20140305.21
T2  - International Journal of Materials Science and Applications
JF  - International Journal of Materials Science and Applications
JO  - International Journal of Materials Science and Applications
SP  - 205
EP  - 209
PB  - Science Publishing Group
SN  - 2327-2643
UR  - https://doi.org/10.11648/j.ijmsa.20140305.21
AB  - The triple-layered transparent conductive oxide thin films, AZO/Mo/AZO (OMO) structure, is present in the paper. The OMO film is deposited on polycarbonate (PC) substrates by a co-sputtering process at room temperature. Metal Mo is chosen because of its chemical stable and low resistivity. The OMO film shows a great reduction of resistivity through the addition of Mo layer. The dependence of the AZO thickness of the electro-optical characteristic to the OMO film is also discussed. A best figure of merit (FOM) of 1.56 × 10-5 -1 with a sheet resistance of 530 Ω/□ and average transmittance of 62% is found at the OMO film of 130 nm thickness. At this condition, the AZO film shows a low resistivity due to its excellent crystallinity.
VL  - 3
IS  - 5
ER  -

Copy | Download