Design, Manufacturing and Test of a High-Precision MEMS Inclination Sensor for Navigation Systems in Robot-Assisted Surgery

Benjamin Arnold; Daniel Wohlrab; Christoph Meinecke; Danny Reuter; Jan Mehner

doi:doi:10.11648/j.ijbse.20180601.11

| Peer-Reviewed

Design, Manufacturing and Test of a High-Precision MEMS Inclination Sensor for Navigation Systems in Robot-Assisted Surgery

Benjamin Arnold, Daniel Wohlrab, Christoph Meinecke, Danny Reuter, Jan Mehner

Published in International Journal of Biomedical Science and Engineering (Volume 6, Issue 1)

Received: 29 November 2017 Accepted: 15 January 2018 Published: 1 February 2018

Views: Downloads:

Download PDF

Share This Article

Twitter
Linked In
Facebook

Abstract

Robot supported minimally invasive interventions are state of the art in operating theatres. To increase the accuracy of surgical instrument positioning, high-precision motion tracking systems are required. The miniaturization of microelectromechanical systems (MEMS) facilitates the placing of orientation detection sensors close to the mounting of the surgical instrument to enhance positioning accuracy. A high resolution inclination sensor was developed using the innovative approach of laser-micro-welding. Trench sizes down to 800 nm are fabricated with more than 6-fold increase in aspect ratios (structure depth to electrode gap) compared to sensors without gap reduction. Electrical and physical tests as well as finite-element-simulations were performed. An increased sensitivity from 7.2 fF/° up to 60 fF/° was verified for the sensor with reduced electrode gap and a customized ASIC.

Published in	International Journal of Biomedical Science and Engineering (Volume 6, Issue 1)
DOI	10.11648/j.ijbse.20180601.11
Page(s)	1-6
Creative Commons	This is an Open Access article, distributed under the terms of the Creative Commons Attribution 4.0 International License (http://creativecommons.org/licenses/by/4.0/), which permits unrestricted use, distribution and reproduction in any medium or format, provided the original work is properly cited.
Copyright	Copyright © The Author(s), 2018. Published by Science Publishing Group

Keywords

Surgical Robot Navigation, Inertial Sensor, Inclination Sensor, Microelectromechanical System (MEMS), Gap Reduction

References

[1]	J. Marescaux, J. Leroy, F. Rubino et al. Transcontinental Robot-Assisted Remote Telesurgery: Feasibility and Potential Applications. Annals of Surgery. Vol. 235, No. 4, 2002, pp. 487-492.
[2]	The Lancet. Robotic surgery evaluation: 10 years too late. The Lancet. Vol. 388, Iss. 10049, 2016, p. 1026, DOI 10.1016/S0140-6736 (16) 31586-0.
[3]	K. J. Rebello. Applications of MEMS in surgery. Proceedings of the IEEE. Vol. 92, Iss. 1, 2004, pp. 43-55, DOI 10.1109/JPROC.2003.820536.
[4]	A. Bertz, M. Küchler, R. Knöfler, T. Gessner. A novel high aspect ratio technology for MEMS fabrication using standard silicon wafers. Sensors and Actuators A: Physical. Vol. 97-98, 2002, pp. 691-701, DOI 10.1016/S0924-4247 (02) 00006-7.
[5]	R. Abdolvand, F. Ayazi. An advanced reactive ion etching process for very high aspect-ratio sub-micron wide trenches in silicon. Sensors and Actuators A: Physical. Vol. 144, Iss. 1, 2008, pp. 109-116, DOI 10.1016/j.sna.2007.12.026.
[6]	F. Marty, L. Rousseau, B. Saadany et al. Advanced etching of silicon based on deep reactive ion etching for silicon high aspect ratio microstructures and three-dimensional micro- and nanostructures. Microelectronics Journal. Vol. 36, Iss. 7, 2005, pp. 673-677, DOI 10.1016/j.mejo.2005.04.039.
[7]	S. Tachi, K. Tsujimoto, S. Okudaira. Low-temperature reactive ion etching and microwave plasma etching of silicon. Applied Physics Letters. Vol. 52, Iss. 8, p. 616, DOI 10.1063/1.99382.
[8]	F. Lärmer, A. Schilp. Method of anisotropically etching silicon. Patent US 5501893, 1996.
[9]	B. Wu, A. Kumar, S. Parmarthy. High aspect ratio silicon etch: A review. Journal of Applied Physics. Vol. 108, Iss. 5, 051101, 2010, DOI 10.1063/1.3474652.
[10]	S. D. Senturia. CAD challenges for microsensors, mi-croactuators, and microsystems. Proceedings of the IEEE. Vol. 86, Iss. 8, 1998, pp. 1611-1626, DOI 10.1109/5.704266.
[11]	D. Galayko et al. Design, realization and testing of micro-mechanical resonators in thick-film silicon technology with postprocess electrode-to-resonator gap reduction. Journal of Micromechanics and Microengineering. Vol. 13, 2004, pp. 134-140.
[12]	C. Acar et al. Post-Release Capacitance Enhancement in Micromachined Devices. IEEE Sensors, Vienna, Austria, Oct. 24-27, 2004, pp. 268-271, DOI 10.1109/ICSENS.2004.1426153.
[13]	W.-C. Chen et al. Realizing deep-submicron gap spacing for CMOS MEMS resonators with frequency tuning capability via modulated boundary conditions. IEEE International Conference on MEMS, Hong Kong, China, Jan. 24-28, 2010, pp. 735-738, DOI 10.1109/MEMSYS.2010.5442301.
[14]	D. Reuter et al. In-Process Gap Reduction of Capacitive Transducers. Sensors and Actuators A: Physical. Vol. 126, Iss. 1, 2006, pp. 211-217, DOI 10.1016/j.sna.2005.09.033.
[15]	M. Nowack et al. Novel Post-Process Gap Reduction Technology of High Aspect Ratio Microstructures Utilizing Micro Welding. Transducers Conference, Beijing, China, Jun. 5-9, 2011, pp. 1352-1355, DOI 10.1109/TRANSDUCERS.2011.5969505.
[16]	Meinecke C et al. Micro welding of aluminum for post process electrode gap reduction using femtosecond laser. Transducers Conference, Anchorage, Alaska, USA, Jun. 21-25, 2015, pp. 1354-1357, DOI 10.1109/TRANSDUCERS.2015.7181183.
[17]	J. Schille et al. Highspeed Laser Micro Processing using Ultrashort Laser Pulses. Journal of Laser Micro / Nanoengineering. Vol. 9, No. 2, 2014, pp. 161-168, DOI 10.2961/jlmn.2014.02.0015.
[18]	T. Veijola. Compact models for squeezed-film dampers with inertial and rarefied gas effects. Journal of Micromechanics and Microengineering. Vol. 14, 2004, pp. 1109-1118.

Cite This Article

Plain Text BibTeX RIS

APA Style

Benjamin Arnold, Daniel Wohlrab, Christoph Meinecke, Danny Reuter, Jan Mehner. (2018). Design, Manufacturing and Test of a High-Precision MEMS Inclination Sensor for Navigation Systems in Robot-Assisted Surgery. International Journal of Biomedical Science and Engineering, 6(1), 1-6. https://doi.org/10.11648/j.ijbse.20180601.11

Copy | Download

ACS Style

Benjamin Arnold; Daniel Wohlrab; Christoph Meinecke; Danny Reuter; Jan Mehner. Design, Manufacturing and Test of a High-Precision MEMS Inclination Sensor for Navigation Systems in Robot-Assisted Surgery. Int. J. Biomed. Sci. Eng. 2018, 6(1), 1-6. doi: 10.11648/j.ijbse.20180601.11

Copy | Download

AMA Style

Benjamin Arnold, Daniel Wohlrab, Christoph Meinecke, Danny Reuter, Jan Mehner. Design, Manufacturing and Test of a High-Precision MEMS Inclination Sensor for Navigation Systems in Robot-Assisted Surgery. Int J Biomed Sci Eng. 2018;6(1):1-6. doi: 10.11648/j.ijbse.20180601.11

Copy | Download

@article{10.11648/j.ijbse.20180601.11,
  author = {Benjamin Arnold and Daniel Wohlrab and Christoph Meinecke and Danny Reuter and Jan Mehner},
  title = {Design, Manufacturing and Test of a High-Precision MEMS Inclination Sensor for Navigation Systems in Robot-Assisted Surgery},
  journal = {International Journal of Biomedical Science and Engineering},
  volume = {6},
  number = {1},
  pages = {1-6},
  doi = {10.11648/j.ijbse.20180601.11},
  url = {https://doi.org/10.11648/j.ijbse.20180601.11},
  eprint = {https://article.sciencepublishinggroup.com/pdf/10.11648.j.ijbse.20180601.11},
  abstract = {Robot supported minimally invasive interventions are state of the art in operating theatres. To increase the accuracy of surgical instrument positioning, high-precision motion tracking systems are required. The miniaturization of microelectromechanical systems (MEMS) facilitates the placing of orientation detection sensors close to the mounting of the surgical instrument to enhance positioning accuracy. A high resolution inclination sensor was developed using the innovative approach of laser-micro-welding. Trench sizes down to 800 nm are fabricated with more than 6-fold increase in aspect ratios (structure depth to electrode gap) compared to sensors without gap reduction. Electrical and physical tests as well as finite-element-simulations were performed. An increased sensitivity from 7.2 fF/° up to 60 fF/° was verified for the sensor with reduced electrode gap and a customized ASIC.},
 year = {2018}
}

Copy | Download

TY  - JOUR
T1  - Design, Manufacturing and Test of a High-Precision MEMS Inclination Sensor for Navigation Systems in Robot-Assisted Surgery
AU  - Benjamin Arnold
AU  - Daniel Wohlrab
AU  - Christoph Meinecke
AU  - Danny Reuter
AU  - Jan Mehner
Y1  - 2018/02/01
PY  - 2018
N1  - https://doi.org/10.11648/j.ijbse.20180601.11
DO  - 10.11648/j.ijbse.20180601.11
T2  - International Journal of Biomedical Science and Engineering
JF  - International Journal of Biomedical Science and Engineering
JO  - International Journal of Biomedical Science and Engineering
SP  - 1
EP  - 6
PB  - Science Publishing Group
SN  - 2376-7235
UR  - https://doi.org/10.11648/j.ijbse.20180601.11
AB  - Robot supported minimally invasive interventions are state of the art in operating theatres. To increase the accuracy of surgical instrument positioning, high-precision motion tracking systems are required. The miniaturization of microelectromechanical systems (MEMS) facilitates the placing of orientation detection sensors close to the mounting of the surgical instrument to enhance positioning accuracy. A high resolution inclination sensor was developed using the innovative approach of laser-micro-welding. Trench sizes down to 800 nm are fabricated with more than 6-fold increase in aspect ratios (structure depth to electrode gap) compared to sensors without gap reduction. Electrical and physical tests as well as finite-element-simulations were performed. An increased sensitivity from 7.2 fF/° up to 60 fF/° was verified for the sensor with reduced electrode gap and a customized ASIC.
VL  - 6
IS  - 1
ER  -

Copy | Download

Author Information

Benjamin Arnold

Department of Microsystems and Biomedical Engineering, Faculty of Electrical Engineering and Information Technology, University of Technology Chemnitz, Chemnitz, Germany
Daniel Wohlrab

Department of Microsystems and Biomedical Engineering, Faculty of Electrical Engineering and Information Technology, University of Technology Chemnitz, Chemnitz, Germany
Christoph Meinecke

Center for Microtechnologies, University of Technology Chemnitz, Chemnitz, Germany
Danny Reuter

Center for Microtechnologies, University of Technology Chemnitz, Chemnitz, Germany
Jan Mehner

Department of Microsystems and Biomedical Engineering, Faculty of Electrical Engineering and Information Technology, University of Technology Chemnitz, Chemnitz, Germany

Download PDF

Sections

Plain Text BibTeX RIS

APA Style

Benjamin Arnold, Daniel Wohlrab, Christoph Meinecke, Danny Reuter, Jan Mehner. (2018). Design, Manufacturing and Test of a High-Precision MEMS Inclination Sensor for Navigation Systems in Robot-Assisted Surgery. International Journal of Biomedical Science and Engineering, 6(1), 1-6. https://doi.org/10.11648/j.ijbse.20180601.11

Copy | Download

ACS Style

Benjamin Arnold; Daniel Wohlrab; Christoph Meinecke; Danny Reuter; Jan Mehner. Design, Manufacturing and Test of a High-Precision MEMS Inclination Sensor for Navigation Systems in Robot-Assisted Surgery. Int. J. Biomed. Sci. Eng. 2018, 6(1), 1-6. doi: 10.11648/j.ijbse.20180601.11

Copy | Download

AMA Style

Benjamin Arnold, Daniel Wohlrab, Christoph Meinecke, Danny Reuter, Jan Mehner. Design, Manufacturing and Test of a High-Precision MEMS Inclination Sensor for Navigation Systems in Robot-Assisted Surgery. Int J Biomed Sci Eng. 2018;6(1):1-6. doi: 10.11648/j.ijbse.20180601.11

Copy | Download

@article{10.11648/j.ijbse.20180601.11,
  author = {Benjamin Arnold and Daniel Wohlrab and Christoph Meinecke and Danny Reuter and Jan Mehner},
  title = {Design, Manufacturing and Test of a High-Precision MEMS Inclination Sensor for Navigation Systems in Robot-Assisted Surgery},
  journal = {International Journal of Biomedical Science and Engineering},
  volume = {6},
  number = {1},
  pages = {1-6},
  doi = {10.11648/j.ijbse.20180601.11},
  url = {https://doi.org/10.11648/j.ijbse.20180601.11},
  eprint = {https://article.sciencepublishinggroup.com/pdf/10.11648.j.ijbse.20180601.11},
  abstract = {Robot supported minimally invasive interventions are state of the art in operating theatres. To increase the accuracy of surgical instrument positioning, high-precision motion tracking systems are required. The miniaturization of microelectromechanical systems (MEMS) facilitates the placing of orientation detection sensors close to the mounting of the surgical instrument to enhance positioning accuracy. A high resolution inclination sensor was developed using the innovative approach of laser-micro-welding. Trench sizes down to 800 nm are fabricated with more than 6-fold increase in aspect ratios (structure depth to electrode gap) compared to sensors without gap reduction. Electrical and physical tests as well as finite-element-simulations were performed. An increased sensitivity from 7.2 fF/° up to 60 fF/° was verified for the sensor with reduced electrode gap and a customized ASIC.},
 year = {2018}
}

Copy | Download

TY  - JOUR
T1  - Design, Manufacturing and Test of a High-Precision MEMS Inclination Sensor for Navigation Systems in Robot-Assisted Surgery
AU  - Benjamin Arnold
AU  - Daniel Wohlrab
AU  - Christoph Meinecke
AU  - Danny Reuter
AU  - Jan Mehner
Y1  - 2018/02/01
PY  - 2018
N1  - https://doi.org/10.11648/j.ijbse.20180601.11
DO  - 10.11648/j.ijbse.20180601.11
T2  - International Journal of Biomedical Science and Engineering
JF  - International Journal of Biomedical Science and Engineering
JO  - International Journal of Biomedical Science and Engineering
SP  - 1
EP  - 6
PB  - Science Publishing Group
SN  - 2376-7235
UR  - https://doi.org/10.11648/j.ijbse.20180601.11
AB  - Robot supported minimally invasive interventions are state of the art in operating theatres. To increase the accuracy of surgical instrument positioning, high-precision motion tracking systems are required. The miniaturization of microelectromechanical systems (MEMS) facilitates the placing of orientation detection sensors close to the mounting of the surgical instrument to enhance positioning accuracy. A high resolution inclination sensor was developed using the innovative approach of laser-micro-welding. Trench sizes down to 800 nm are fabricated with more than 6-fold increase in aspect ratios (structure depth to electrode gap) compared to sensors without gap reduction. Electrical and physical tests as well as finite-element-simulations were performed. An increased sensitivity from 7.2 fF/° up to 60 fF/° was verified for the sensor with reduced electrode gap and a customized ASIC.
VL  - 6
IS  - 1
ER  -

Copy | Download